Equipments

Clean Room

Cleaning, Preparation and Wet Removal Laboratory for Device Production
Lithography and Dry Etching Laboratory
Electronic, Optoelectronic and Microelectronic Device Processing Laboratory
Thin Film Laboratory
Substrate Individualization and Micro-Welding Laboratory

Testing and Control Laboratory

Spectrometers and Optic Characterization Systems
Electric Characterization Systems

Process Development Support Laboratories

Laboratories for Support of Semiconductor Thin Film Development using the PECVD and Heated Filament Assisted Vapor Chemical Decomposition techniques
Diffusion Processes Development Support Laboratory
Lithographic Support Laboratory
Laboratory for Support of Thin Film Production using the Cathode Pulverization and Gas Sensor Test technique
Laboratory for Support of Film Production Techniques' Development , using Spray Pyrolysis and Electrodepositing
Material Testing Bench